MEMS SINGLE MIRRORS
MEMS SCANNING MIRROR
The MEMS scanning mirror chip tilts to allow high speed fully controlled non-resonant and resonant beam steering.
Actuation is by ultra-low current analog voltage input. With non-resonant actuation, arbitrary beam deflection paths and scan area shapes are possible.
Advantages include: large mirror size, high switching speed, low power consumption, and stable tilting angle.
Mirror chips are available as bare unpackaged die or can be custom packaged to your requirements.
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Preciseley Microtechnology Corporation
NINT Innovation Center
11421 Saskatchewan Drive
Edmonton, AB Canada T6G 2M9