A MEMS micro-mirror or mirror array device is ideally used in high precision or portable optical system applications where footprint and power consumption need to be reduced and optimized.

Preciseley’s patented electrostatic-driven MEMS mirrors have the benefit of a large tilting range and decoupled two-axis movement for superior performance. The quasi-statically tilted MEMS mirror only requires open-loop control for beam steering functions and can also work in resonating mode if position feedback is provided.

The advantage of using a quasi-static MEMS mirror for scanning is the local zooming capability, as opposed to a resonating type MEMS mirror where the scanning area can be reduced but not shifted in position. The local zooming enables localized scans to reduce data response time of the optical system.

Preciseley’s high fill factor MEMS mirror array is designed to work with diffraction grating for high performance solid-state LiDAR systems. The large tilting range and high fill factor found in our MEMS mirror array can eliminate the need of the expensive linear detector array.

The great durability and micro scale size enable our MEMS mirrors to be an ideal choice for small footprint, low-cost LiDAR systems designed for automobiles and drones. The MEMS mirror array technique gives the possibility for achieving large mirror area and high mirror stability at the same time.


Contact us to learn more about how we can develop a MEMS products and applications perfectly suited to your needs.