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Packaged MEMS Mirror and Array Chips
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Packaged MEMS mirror chips
- Single and dual axis tilting mirror
- Electrostatic actuation
- Al and Au coated mirror
- Quasi static and resonating modes
- Package size: Ø8.22×3.98 mm (TO39)
- Can be driven by our MEMS Driver Evaluation Board
Optical Field of View (FOV)
- PMC-TO39-0.8-1: up to X axes=13 and Y axes=10 deg. (in quasi static mode) with Ø 0.8 mm of mirror size;
- PMC-TO39-1.0-1: up to X axes=20 and Y axes=10 deg. (in quasi static mode) with Ø 1.0 mm of mirror size;
- PMC-TO39-1.2-1: up to X axes=20 and Y axes=0 deg. (in quasi static mode) with Ø 1.2 mm of mirror size;
- PMC-TO39-1.5-1: up to X axes=32 and Y axes=0 deg. (in quasi static mode) with Ø 1.5 mm of mirror size;
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Packaged MEMS mirror array chips
- Single and dual axis tilting mirror, 40, 60, 90 etc. linear mirror array
- Electrostatic actuation
- Al and Au coated mirror
- Quasi static and resonating modes
- High fill factor
- Can be driven by our MEMS Driver Evaluation Board