The MEMS scanning mirror chip tilts to allow high speed fully controlled non-resonant and resonant beam steering. Actuation is by ultra-low current analog voltage input. With non-resonant actuation, arbitrary beam deflection paths and scan area shapes are possible.
- Large mirror size
- High switching speed
- Low power consumption
- Stable tilting angle.
- Mirror chips are available as bare unpackaged die or can be custom packaged to your requirements.