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MEMS Mirror array
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High density mirror array chips are available for multiple or dispersed beam steering on 1-axis or 2-axis. The designs high mirror counts can be supported with backside electrical connections. The array chip designs are optimized for stability and repeatability with an absolute minimum of cross-talk between adjacent mirror structures. Mirror array are available as bare unpackaged die or can be custom packaged to your requirements.
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LINEAR MIRROR ARRAY
- Extremely high fill factor greater than 95%
- Fixed or variable mirror pitch
- Mirror length up to 1 mm or more
- 1-axis or 2-axis tilting
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MATRIX MIRROR ARRAY
- Array size not limited by technology
- 2-axis tilting