The translating (out of plane moving) MEMS mirror chip is designed for quasi-static operation and has stability and repeatability suitable for applications where nanoscale cavities or phase-shifting is required. Control is by ultra-low current analog voltage input.

Comb_SiN_rev3_med preciseley-mems-pison-mirror


  • Large mirror size
  • High switching speed
  • Low power consumption
  • Stable tilting angle.
  • Mirror chips are available as bare unpackaged die or can be custom packaged to your requirements.