Taken from the Fraunhofer ENAS site: 

Saxony-based EDC Electronic Design Chemnitz GmbH, the Fraunhofer Institute for Electronic Nano Systems (ENAS) and Canadian firm Preciseley Microtechnology Corporation have been working together in a collaboration fund since April 2015.

The objective of the joint project is to develop a micro-opto-electro-mechanical system (MOEMS) for optical coherence tomography (OCT). The solution should enable high-resolution, in vivo OCT diagnostics. The only way to increase the precision of the OCT procedure while also achieving the objective of miniaturisation is by using integrated piezoelectric sensors and an application-specific integrated control circuit. This makes it possible to integrate high-precision coherence tomography in an endoscope and obtain non-invasive, three-dimensional images of tissue structures.

OCT is a medical imaging procedure used for three-dimensional, in vivo diagnostics in a variety of medical fields, such as ophthalmology. Non-invasive OCT exams can be used to determine the condition of the retina and to detect any potential disorders or diseases. OCT allows doctors to obtain three-dimensional images of tissue structures. The advantages compared to competing procedures are the high resolution and the high level of penetration into the tissue. In contrast to sonography, which is based on an acoustic procedure, OCT is based on optical interferometry (distance measurement).
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The three partners in this joint effort are combining their expertise to develop such a system for optical coherence tomography. As part of the project, the Canadian firm Preciseley Microtechnology Corporation is developing an MOEMS that can be used to scan the tissue layers that need to be examined. The Fraunhofer ENAS is integrating a piezoelectric sensor in the MOEMS to increase the accuracy of the system. EDC Electronic Design Chemnitz GmbH is developing an application-specific integrated circuit (ASIC) for the evaluation and control of these symbiotic sensor-actuator systems.

Preciseley Microtechnology is pleased to announce the availability a MEMS optical shutter with wide ranging application to optical modulation, beam blanking, and reflective switching applications.

The metalized all-silicon design is compact, measuring 1.6 x 1.9 x 0.3 mm, and small enough for integration directly into confined spaces such as a TO can or optical fiber connector.

Blocker movement is proportionately controlled by an externally applied ultra-low current DC voltage signal. Extremely low power electrostatic (non-thermal) operation results in there being virtually no heating by the MEMS device, making it safe for close proximity to temperature sensitive devices.

Unlike reflective solutions, the MEMS optical shutter presents a clear optical path in open mode, neither lengthening nor degrading that pathway. In the closed position the blocker moves into the beam path, reflecting it to an absorption surface or alternate optical path. The blocker is available in a range of size and displacement configurations with reflective gold or aluminum coatings and is extensively customizable to meet customer requirements.

Preciseley MEMS optical shutters are available in low volume with flexible specification for customer integration.

Tokyo Big Sight, East Hall, Tokyo, Japan
July 3-5, 2013
Booth #B-30

Shenzhen Convention & Exhibition Center
Shenzhen, China
Sept 4-7, 2013
Booth # 1A33-2 (Canadian Pavilion)

Preciseley MEMS shutters enables a highly miniaturized low power atomic clock produced by Sandia National Laboratories Low-power miniature 171Yb ion clock using an ultra-small vacuum package. Appl. Phys. Lett. 101, 253518 (2012)