By Dr. Tiansheng Zhou
Optical micro electromechanical systems (MEMS) mirrors and mirror arrays have played an important role in the explosive growth of fiber-optic communications. Millions of the chips have been supplied to the global market just since 2018. MEMS mirrors and mirror arrays enable smaller form factors, higher reliability, and ultra-low power consumption compared to the conventional technologies such as electrical motordriven products. As a result, the market demand has increased each year for MEMS-based variable optical attenuators (VOAs), tunable optical filters (TOFs), optical channel monitors (OCMs), and 1xN switches.