PACKAGED MEMS PRODUCTS

PACKAGED MEMS MIRROR AND ARRAY CHIPS

1. Packaged MEMS mirror chips are available with the following specifications:

  • Single and dual axis tilting mirror
  • Electrostatic actuation
  • Al and Au coated mirror
  • Quasi static and resonating modes
  • Package size: Ø8.22×3.98 mm (TO39)
  • Can be driven by our MEMS Driver Evaluation Board

Optical Field of View (FOV)
1. PMC-TO39-0.8-1: up to X axes=13 and Y axes=10 deg. (in quasi static mode) with Ø 0.8 mm of mirror size;
2. PMC-TO39-1.0-1: up to X axes=20 and Y axes=10 deg. (in quasi static mode) with Ø 1.0 mm of mirror size;
3. PMC-TO39-1.2-1: up to X axes=20 and Y axes=0 deg. (in quasi static mode) with Ø 1.2 mm of mirror size;
4. PMC-TO39-1.5-1: up to X axes=32 and Y axes=0 deg. (in quasi static mode) with Ø 1.5 mm of mirror size;​

2. Packaged MEMS mirror array chips are available with the following specifications:

  • Single and dual axis tilting mirror, 40, 60, 90 etc. linear mirror array
  • Electrostatic actuation
  • Al and Au coated mirror
  • Quasi static and resonating modes
  • High fill factor
  • Can be driven by our MEMS Driver Evaluation Board
View detailed specifications (samples) below:

Packaged MEMS mirror chips
Download File

Packaged MEMS array chip
Download File

TALK TO US

Custom configurations are available. For pricing or further product detail, please get in touch.

CONTACT

Preciseley Microtechnology Corporation
NINT Innovation Center
11421 Saskatchewan Drive
Edmonton, AB Canada T6G 2M9 

Tel: +1 780 641 1925
Email: info@preciseley.com