PACKAGED MEMS PRODUCTS
PACKAGED MEMS MIRROR AND ARRAY CHIPS



1. Packaged MEMS mirror chips are available with the following specifications:
- Single and dual axis tilting mirror
- Electrostatic actuation
- Al and Au coated mirror
- Quasi static and resonating modes
- Package size: Ø8.22×3.98 mm (TO39)
- Can be driven by our MEMS Driver Evaluation Board
Optical Field of View (FOV)
1. PMC-TO39-0.8-1: up to X axes=13 and Y axes=10 deg. (in quasi static mode) with Ø 0.8 mm of mirror size;
2. PMC-TO39-1.0-1: up to X axes=20 and Y axes=10 deg. (in quasi static mode) with Ø 1.0 mm of mirror size;
3. PMC-TO39-1.2-1: up to X axes=20 and Y axes=0 deg. (in quasi static mode) with Ø 1.2 mm of mirror size;
4. PMC-TO39-1.5-1: up to X axes=32 and Y axes=0 deg. (in quasi static mode) with Ø 1.5 mm of mirror size;
2. Packaged MEMS mirror array chips are available with the following specifications:
- Single and dual axis tilting mirror, 40, 60, 90 etc. linear mirror array
- Electrostatic actuation
- Al and Au coated mirror
- Quasi static and resonating modes
- High fill factor
- Can be driven by our MEMS Driver Evaluation Board
TALK TO US

CONTACT
Preciseley Microtechnology Corporation
NINT Innovation Center
11421 Saskatchewan Drive
Edmonton, AB Canada T6G 2M9
Tel: +1 780 641 1925
Email: info@preciseley.com