2010903961
preciseley-2d-mems-mirror-on-to39-can preciseley-2d-mems-mirror-on-to39-header

Packaged MEMS mirror chips


  • Single and dual axis tilting mirror
  • Electrostatic actuation
  • Al and Au coated mirror
  • Quasi static and resonating modes
  • Package size: Ø8.22×3.98 mm (TO39)
  • Can be driven by our MEMS Driver Evaluation Board

Optical Field of View (FOV)

  • PMC-TO39-0.8-1: up to X axes=13 and Y axes=10 deg. (in quasi static mode) with Ø 0.8 mm of mirror size;
  • PMC-TO39-1.0-1: up to X axes=20 and Y axes=10 deg. (in quasi static mode) with Ø 1.0 mm of mirror size;
  • PMC-TO39-1.2-1: up to X axes=20 and Y axes=0 deg. (in quasi static mode) with Ø 1.2 mm of mirror size;
  • PMC-TO39-1.5-1: up to X axes=32 and Y axes=0 deg. (in quasi static mode) with Ø 1.5 mm of mirror size;​
packaged-ma1-on-pcb-with-protective-and-remoable-glass-lid

Packaged MEMS mirror array chips


  • Single and dual axis tilting mirror, 40, 60, 90 etc. linear mirror array
  • Electrostatic actuation
  • Al and Au coated mirror
  • Quasi static and resonating modes
  • High fill factor
  • Can be driven by our MEMS Driver Evaluation Board