Packaged MEMS Mirror and Array Chips

• Single and dual axis tilting mirror
• Electrostatic actuation
• Al and Au coated mirror
• Quasi static and resonating modes
• Package size: Ø8.22×3.98 mm (TO39)
• Can be driven by our MEMS Driver Evaluation Board

Optical Field of View (FOV)

• PMC-TO39-0.8-1: up to X axes=13 and Y axes=10 deg. (in quasi static mode) with Ø 0.8 mm of mirror size;
• PMC-TO39-1.0-1: up to X axes=20 and Y axes=10 deg. (in quasi static mode) with Ø 1.0 mm of mirror size;
• PMC-TO39-1.2-1: up to X axes=20 and Y axes=0 deg. (in quasi static mode) with Ø 1.2 mm of mirror size;
• PMC-TO39-1.5-1: up to X axes=32 and Y axes=0 deg. (in quasi static mode) with Ø 1.5 mm of mirror size;​

• Single and dual axis tilting mirror, 40, 60, 90 etc. linear mirror array
• Electrostatic actuation
• Al and Au coated mirror
• Quasi static and resonating modes
• High fill factor
• Can be driven by our MEMS Driver Evaluation Board